We shall exhibit "26th FINETECH Japan" at MEMS Technology Zone

[ M E M S ]
MEMS Device Volume Production (MEMS Foundry)

• Partnership with Silex microsystems
• Pure-Play MEMS foundry without in house manufactured products
• Equipped φ6” and φ8” production line dedicated for MEMS.
  • == Platform technology to realizing high yields ==
    - TSV technology for high temperature and density with Sil-Via, all Si structure.
    - TSV technology for high yield by Cu hollow construction with Met-Via/Met-Cap
    - Established PZT thin film deposition with Sol-Gel method.
  • == "SmartBLOCK" to realize high cost-effectiveness ==
    - SmartBLOCK uses proven process blocks extracted from working process libraries to integrate functionality into a single structure. Faster more cost-efficient development through modular standardization using SmartBLOCK will support customers for timely product release.

[ Nanoimprint ]
Total solution with mold fabrication -imprinting services -related material supply

• Mold fabrication (Nano〜Micro order mold)
• Imprint process services (Introducing imprinting services results over 1000 cases including large size imprinting)
• Suitable material offer for imprinting condition
• Seamless RtR mold for mass production

Application of Micro/Fine structure and technology consulting

• Anti-Reflection structure (Solar cell, Display etc.)
• Hydrophobic structure (Window, Packing material for liquid etc.)
• Anti-fogging structure (Bio technology etc.)
• Droplet catch structure (flow controlling products)

Nanoimprinting Product

• Schale with cell culture chip
• Sapphire glass with anti-reflection structure