All plastic versatile Spin processor
All plastic versatile Spin processor "POLOS "
"POLOS™" manufactured by SPS is a spin processor with all plastic design, brushless motor equipped and many options and expandability available.
The versatile, all plastic, POLOS™ and SPIN150™ single substrate spin processors are specifically designed for applications for MEMS, R&D and typically low volume applications. Spin developing, spin etching, rinse / cleaning, spin drying.
Benefits
- Full plastic systems;
- Easy to use = It can be easily cleaned.
- Can be used for multiple processes: etching, development, spin-dry, etc.
- Chemical inert (Polypropylene, Teflon).
- Use of brushless motor
- Rotation of heavy substrates works flawlessly.
- Acceleration/ Backwards rotation/ no rotation values settable.
- Rotation speed up to 10000rpm. Coating with high viscosity material also possible
- Many options and expandability available
- availableSubstrate dimensions from chip size up to 1000×1000mm can be handled.
- Various line-ups of choices for many applications
* Dispense type: manual / automatic
* Desktop type / OEM type
* All inclusive system "Mini Wet Station" - Wide choice available for fixing the substrate (ex. Vacuum chuck, Mechanical chuck, etc.)
- Many customizations available for pumps, tanks, feed back systems for external apparatus, etc.
All plastic versatile Spin processor POLOS Line-up
| Specifications | Applications | |||||||||
|---|---|---|---|---|---|---|---|---|---|---|
| Model | Description | Substrate and Size | Dry | Rinse | Cleaning | Etching | Development | Coating Manual |
Coating Automatic |
|
| Manual | Spin150i Desktop Spin150i -INT Built-in |
Basic model -3 output connecters (i.e.: Dispense unit, N2 diffuser etc.) -Output connecter enables to be used as an Automatic dispens |
Up to φ160mm (or 6”) or 4”x4” | ○ | ○ | ○ | ○ | ○ | ○ | - |
| Manual | Spin200i Desktop Spin200i-INT Built-in |
Basic model -3 output connecters (i.e.: Dispense unit, N2 diffuser etc.) -Output connecter enables to be used as an Automatic dispens |
Up to φ260mm (or 8”) or 6”x6” | ○ | ○ | ○ | ○ | ○ | ○ | - |
| Automatic | POLOS200i-ADV Desktop POLOS200i-ADV-INT Built-in |
Advanced model -Infinite I/O control by LAN connection -High torque robust motors for heavy substrates or high speed -System integrated solutions available on request |
Up to φ260mm(or 8”) or 6”x6” | ○ | ○ | ○ | ○ | ○ | - | ○ |
| Automatic | POLOS300i-ADV Desktop POLOS300i-ADV-INT Built-in |
Advanced model -Infinite I/O control by LAN connection -High torque robust motors for heavy substrates or high speed -System integrated solutions available on request |
Up to φ360mm(or 12”) or 8”x8” | ○ | ○ | ○ | ○ | ○ | - | ○ |
＊Up to 1000mm square substrates can be applied as an option
All plastic versatile Spin processor POLOS common characteristics
| Chamber Material | -NPP (Standard) or PTFE (Optional) A seamless chamber structure by chemical-resistant polypropylene (Teflon as an option). Easy to clean. |
|---|---|
| Control Panel | -Touch panel operation. Detachable Operable with glove. Suitable for use in glove box. |
| Program | -Unlimited programs and storage capacity* -Minimum step time ±0.1sec. External PC is unnecessary *USB, PC software etc. are possible by adding standard unit. |
| Data Port | USB |
| Included Substrate Holder | -Standard Vacuum Chuck -Small adapter forφ 1/2“- φ 2’’ (Various holders are available optionally) |
| Rotating Speed | -Up to 12000rpm (150 or 200 series) -Up to 10000rpm (300 series) Clockwise, Anticlockwise, Paddle action |
| Acceleration | 0-3000 rpm/sec |
| Rotating Accuracy | ±1rpm |
| Power Supply | 100–120VAC, 50/60Hz, 2.5A |
| Power Consumption | 500W (max) |
All included system "Mini Wet Station"
By integrating Spin processor and high accuracy chemicals supply system in one body, it is possible to set up multiple processes in a single program. Chemical sharing system, liquid disposal system and ventilation system are mounted in a cabinet with sensor-monitored alarm system, guarantees safety in operation. Spin processor applies materials (PP, PTFE, etc.) which offer the same superior chemical inertness as other models.
Feature
| Substrate | 300mm mm model (Can handle substrate up to Φ260mm) Φ400mm model (Can handle substrate up to Φ360mm) Customized Spin Processor can handle substrates up to 600mm×600mm. |
|---|---|
| Chamber Materials | PP, PTFE (TFM1600), PFA, ECTFE |
| Motor | - Standard type 1 - 10,000rpm, clock-wise rotation, in case of φ8" substrate, acceleration is 2,000rpm/s. - Heavy duty type 1 - 10,000rpm, clock-wise and reverse clock-wise rotation, in case of Φ8" substrate, acceleration is 2,000rpm/s. Selectable from above. For more information about motor types, please contact us |
| Main Option | Linear drive chemicals delivered arm, chemicals delivery nozzle / line expansions, mega sonic cleaning. Recirculation possible Chemical supply, ventilation system, high pressure jet, supplied chemical temperature control, spray nozzle to be attached on the back or central side ( for example, for edge bead removal etc.), various chuck (300 types such as vacuum, mechanical, backside protection etc.), Safety interlock. |
＊Up to 1000mm square substrates can be applied as an option
POLOS Chucks
| Vacuum chuck for small size substrates |
|
|---|---|
| Mechanical chuck |
|
|
Mechanical chuck for squared substrates
(Mask, Crystal cells) |
|
| Other vacuum chucks for different substrates shapes and sizes |
|
| Vacuum chuck for circular substrates (Φ2" –Φ300") |  |
|---|---|
| For circular substrate (Vacuum chuck + centering pin) |  |
| Mechanical chuck for squared substrates (Φ2", Φ3", Φ4") |  |
| Other mechanical chucks (Please ask for more information) |  |
Chemical Compatibility Chart
[Reference Information]
Chamber material :NPP（Natural Poly Propylene）as a standard or PTFE as an option ◯：Usable -：Unusable ▲：Ask before use as it may cause destruction depend on conditions
| Acetic acid | Formula | NPP | PTFE |
|---|---|---|---|
| Acetic acid | C2H2O2 | ○ | ○ |
| Acetone | C3H6O | ○ | ○ |
| α-terpineol | C10H18O | ○ | ○ |
| Ammonium hydroxide | NH4OH | ○ | ○ |
| Amyl chloride | C5H11Cl | - | ○ |
| Methoxybenzene | C7H8O | ○ | ○ |
| Benzene | C6H6 | - | ○ |
| Bromine | Br | - | ▲ |
| Chlorobenzene | C6H5OI | ○ | ○ |
| Chloroform | CHCl3 | ○ | ○ |
| Diethyl ketone | C5H10O | ○ | ○ |
| Dimethyl malonate | C11H20O4 | ○ | ○ |
| Ethylene glycol | C2H6O2 | ○ | ○ |
| Cyclohexane | C6H12 | - | ○ |
| Cyclohexanone | C6H10O | - | ○ |
| Fluorine | F2 | - | - |
| Hexamethyldisilazane | C6H19NSi2 | ○ | ○ |
| Hexane | C6H14 | ○ | ○ |
| Oxalic acid | HBr | ▲ | ▲ |
| Hydrochloric acid | HCI | ▲ | ▲ |
| Hydrofluoric acid | HF | ▲ | ▲ |
| Hydrogen peroxide solution | H2O2 | ○ | ○ |
| Iodine | I2 | ○ | ○ |
| Isopropyl alcohol (IPA) | C3H8O | ○ | ○ |
| Trimethylbenzene | C9H12 | ○ | ○ |
| Ozone water | O3 ＆ H2O | ○ | ○ |
| Methanol | CH4O | ○ | ○ |
| Methyl ethyl ketone (MEK) | C4H8O | ○ | ○ |
| Methylene chloride | CH2CI2 | ○ | ○ |
| Methyl isobutyl ketone (MIK) | C6H12O | ○ | ○ |
| N-Methyl-2-Pyrolidone (NMP) | C5H9NO3 | ○ | ○ |
| Nitric acid | HNO3 | ▲ | ○ |
| Phosphoric acid | H3O4P | ○ | ○ |
| Photoresist | - | ○ | ○ |
| Polymethylmethacrylate (PMMA) | C5H8O2 | ○ | ○ |
| Potassium hydrate | KOH | ○ | ○ |
| Sulfuric acid | H2SO4 | ▲ | ▲ |
| Tetra hydro furane (THF) | C4H8O | ○ | ○ |
| Toluene | C7H8 | ○ | ○ |
| Trichloroethane (TCA) | C2H3CI3 | ○ | ○ |
| Trichlorethylene (TCE) | C2HCI3 | ○ | ○ |
| Xylene | C12H15O6 | ○ | ○ |
Related product
A precision hotplate which is suitable for pre-bake and post-bake. Table top size. Customizable. Manufactured by SPS
- MEMS
- IC
- PV
- BIO
検索用入力欄
記入時注意事項
- テーブルの行列は変更しないでください。
- 分類が複数ある場合は、| ←半角の縦棒で区切って連続で入力してください。
また、区切り文字の前後に空白は入れないでください。
| 製品分類1 | Microfabrication Tools |
|---|---|
| 製品分類2 | Spin Processor |
| プロセス分類 | Process & Equipment |
| サムネイル画像 |
|
| 説明文 |
|
| リダイレクトURL |
|