Wafer Holder
Silicet is a specialized global supplier of advanced etching technologies for micromachining. Our specific field is the development and production of high quality wafer holders and flexible process-units for chemical and electro-chemical etching as well as for electroplating processes.
As developer with many years of experience in the field of industrial and product design we are specialized in constructing and producing tools specific to our customers applications. We deliver our products to Europe, Asia and the United States of America. In Germany we work together with customers like Siemens, Bosch, Karlsruher Institut für Technologie, Fraunhofer Institutes and several universities.
| Chemical etching | Vacuum holder BASIC |
|---|---|
| Chemical etching, electrolytic etching, electroplating | TRIO-PLUS holder |
| Accessories | Vacuum holder BASIC accessories – Vacuum box |
Benefits
- Complete absorption of substrate by vacuum (low resist design).
- Eliminates backside coating process and mask.
- Reduce process and material cost. Achieve better yield.
- Applicable for various substrates.
Vacuum holder BASIC for chemical etching
- Wafer held securely by vacuum along the perimeter
- Working surface 100%
- Backside fully protected
- Material:
- Body: PTFE - compatible with all etchants
- Hose: Norprene or Viton
- Sealing lips: EPDM or Viton
- Available for substrates from 2"-12" as well as rectangular substrates or fragments
- Easy handling
- Optional: Vacuum box
- VB01 for KOH/TMAH etching
- VB02 for HF etching
TRIO-PLUS holder for chemical etching, electrolytic etching and electroplating
- Wafer held mechanically
- Clamping force by four clips absolutely stress free
- Working surface: excl. 3mm circumferential
- Backside fully protected
- Material:
- Body: Peek/PVDF/PP/PTFE - adapted to etchant/electrolyte
- Sealing lips: PVDF
- Available for substrates from 2"-12" as well as rectangular substrates or fragments
- Easy handling
- Different types of suspension device available
Vacuum box – accessory for vacuum holder BASIC
- VB01 for KOH/TMAH etching, VB02 for HF etching
- Leak detection, self control function
- Constantly applies optimal pressure
- Easy to operate, inherently safe
- In case of leakage into the pump the liquid is discharged safely
Related product
A mobile electroplating unit which is space-saving and cost-saving. It has a Modular design and is custmizable. Manufactured by Silicet
- MEMS
- IC
検索用入力欄
記入時注意事項
- テーブルの行列は変更しないでください。
- 分類が複数ある場合は、| ←半角の縦棒で区切って連続で入力してください。
また、区切り文字の前後に空白は入れないでください。
| 製品分類1 | Microfabrication Tools|Precision Cleaning / Dryice blast |
|---|---|
| 製品分類2 |
|
| プロセス分類 | Process & Equipment |
| サムネイル画像 |
|
| 説明文 |
|
| リダイレクトURL |
|