Nanoimprint (NIL) Trial Mold (Stamper)

This is a standard mold pattern( mold, stamper), that has beared NIL(Nanoimprinting) or the first tests of the Imprint, in other words all kinds of experiments.

You can choose the best pattern size, which suits your needs: from nano-orders to micro-orders.

Trial Mold (1) 1 - 50µm

Trial Mold (2) 0.5 - 2µm

Trial Mold (3) Nano Pattern

Type	Pattern				Mold		Part No.
	Size	Depth	Feature	Area	Structure	Material
Pattern (1)	50, 100, 150, 200nm	100nm	L/S, Pillar, Hole, Cross, Check, Meanders, on a chip	1.1×1.7mm (8points)	Φ2" (t=500µm)	Si	DTM-3-1
						Quartz	DTM-3-2
Pattern (2)	25nm (Half Pitch)	40nm	L/S	0.4×0.4mm (4points)	20×20mm (t=525µm)	Si	DTM-3-3
	35nm (Half Pitch)	50nm		0.5×1.2mm (4points)			DTM-3-4
Pattern (3)	35nm (Half Pitch)	50nm	Hole (Square)	0.4×0.4mm (4points)	15×15mm (t=525µm)	Si	DTM-3-5
	45nm (Half Pitch)	70nm		0.6×0.6mm (4points)			DTM-3-6
Pattern (4)	125 - 150nm	- 300nm	L/S	30×30mm	Φ4" (t=500µm)	Si	DTM-3-7
		- 150nm				Quartz	DTM-3-8
Pattern (5)	90/250, 100/275, 120/300 nm on a chip	- 200nm		7×7mm (3points)		Si	DTM-3-9
		- 100nm				Quartz	DTM-3-10
Pattern (6)	135/300, 175/400, 250/500, 300/600 nm on a chip	- 300nm		10×10mm (4points)		Si	DTM-3-11
		- 150nm				Quartz	DTM-3-12

* Part of pattern might have defect by optical interference in Pattern (2) and (3).
* Please do not hesitate to contact us about more details of (5) and (6).

Trial Mold (4) Micro Lens Array

Pattern (1)

Pattern				Mold		Part No.
Type	Size	Depth	Area	Structure	Material
(1)	(1) approx Φ2.2µm (2) approx Φ1.3µm (3) approx Φ3.8µm	(1) approx 0.32µm (2) approx 0.12µm (3) approx 0.85µm	5×5mm (3points)	20×20mm (t=1mm)	Si	DTM-4-1
(2)	Φ20µm	3～4µm	60×60mm	70×70mm (t=1mm)		DTM-4-2
(3)	Φ15µm	2～3µm				DTM-4-3
(4)	Φ10µm					DTM-4-4
(5)	Φ9µm	5.5µm	50×50mm	70×70mm (t=300µm)	Ni	DTM-4-5
(6)			100×100mm	120×120mm (t=300µm)		DTM-4-6

Trial Mold (5) Photonic Crystal

Type	Pattern					Mold		Part No.
	Size	Depth	Feature	Area	Pitch	Structure	Material
Pattern (1)	A 275nm B 225nm C 175nm D 125nm	100 - 300nm	Pillar (Trigonal) (Chamfered square)	10×10mm (4points)	A 500nm B 400nm C 300nm D 200nm	Φ2" (t=525µm)	Si	DTM-5-1
Pattern (2)	Φ240nm	- 300nm	Hole (Square)	20×20mm	350nm	Φ4" (t=500µm)	Si	DTM-5-2
		- 150nm					Quartz	DTM-5-3
	Φ260nm	- 450nm	Hole (Trigonal)	20×20mm	520nm		Si	DTM-5-4
		- 200nm					Quartz	DTM-5-5
	Φ300nm	- 450nm		46×46mm	600nm		Si	DTM-5-6
		- 200nm					Quartz	DTM-5-7
	Φ350nm	- 450nm		20×20mm	780nm		Si	DTM-5-8
		- 200nm					Quartz	DTM-5-9
	Φ300nm	- 450nm	Pillar (Trigonal)	46×46mm	600nm		Si	DTM-5-10
		- 200nm					Quartz	DTM-5-11
	Φ130nm	- 200nm	Pillar (Squar)	30×30mm	300nm		Si	DTM-5-12
		- 100nm					Quartz	DTM-5-13
	Φ300nm	- 450nm	Hole (Trigonal)	Φ4">94%	600nm		Si	DTM-5-14
		- 200nm					Quartz	DTM-5-15
	Φ350nm	- 450nm	Pillar (Trigonal)	20×20mm	780nm		Si	DTM-5-16
		- 200nm					Quartz	DTM-5-17
	Φ400nm	- 450nm	Hole (Trigonal)		1500nm		Si	DTM-5-18
		- 200nm					Quartz	DTM-5-19
	Φ400nm-650nm	- 450nm			1000nm		Si	DTM-5-20
		- 200nm			780nm		Quartz	DTM-5-21
	Φ400nm	- 450nm	Pillar (Trigonal)		1500nm		Si	DTM-5-22
		- 200nm			1000nm		Quartz	DTM-5-23
	Φ400nm-650nm	- 450nm			1500nm		Si	DTM-5-24
		- 200nm			1000nm		Quartz	DTM-5-25

 

Trial Mold (6) AR Pattern

Pattern				Mold		Reflectance	Part No.
Size	Depth	Feature	Area	Structure	Mateial
250nm	350nm	Circular Cone	100×100mm	120×120mm(t=300µm)	Ni	<0.2% (500nm-)	DTM-6-1
300nm	300nm		50×50mm	70×70mm(t=300µm)		<0.6% (400nm-)	DTM-6-2
250nm	350nm		200×200mm	250×250mm(t=300µm)		<0.2% (500nm-)	DTM-6-3
300nm	300nm		100×100mm	120×120mm(t=300µm)		<0.6% (400nm-)	DTM-6-4
500nm	700nm		80×80mm	100×100mm(t=300µm)		<0.2% (900nm) <0.3% (1500nm) *Near Infrared	DTM-6-5

Trial Mold (7) 0.5µm Large Area

Pattern					Mold		Part No.
Size	Depth	Feature	Area	Pitch	Structure	Material
0.5µm	1µm	L/S	50×50mm	1µm	Φ4" or Φ6" (t=1mm)	Si	DTM-7-1
Φ0.5µm		Hole (Trigonal)					DTM-7-2
		Pillar (Trigonal)					DTM-7-3

* Please note that there is 1 - 2µm gap at pattern boundary.

Trial Mold (8) Mold for High Intensity

Pattern					Mold		Part No.
Size	Depth	Feature	Area	Pitch	Structure	Material
Φ230nm	200nm	Hole (Trigonal)	Φ120mm	460nm	Φ120mm (t=775µm)	Si	DTM-8-1
		Pillar (Trigonal)					DTM-8-2

Trial Mold (9) Quartz Mold

Pattern				Mold		Part No.
Size	Depth	Feature	Area	Structure	Material
75, 100, 150, 200nm	200nm	L/S	4×4mm (4ヶ所)	20×20mm (t=850µm)	Quartz	DTM-9-1
75nm	150nm		24×24mm	32×34mm (t=850µm)		DTM-9-2
100nm						DTM-9-3
Φ350nm	350nm	Pillar (Squar)				DTM-9-4
Φ250nm	250nm	Pillar (Trigonal)				DTM-9-5
Φ160nm	350nm	Moth-eye (Square)				DTM-9-6
Φ200nm						DTM-9-7
Φ250nm		Moth-eye (Trigonal)				DTM-9-8

* Please note the design is likely to be changed without prior notice.

* Please note it likely have exposure/etching defect or foreign particle in a part of mold (template).

Trial Mold (10) Diffraction Grating Mold

Type	pattern			Mold		Part No.
	Size	Depth	Area	Structure	Material
Linear	500nm	250nm	80 x 80mm	100 x 100 mm (t=300µm)	Ni	DTM-10-1
Crossed						DTM-10-2

Trial Mold (11) Engineered Diffuser Mold

Type	Diffusion angles (FWHM)	Pattern	Mold		Part No.
		Area	Structure	Material
Linear	1°/80°	50 x 50mm	70 x 70 mm (t=300µm)	Ni	DTM-11-1
		100 x 100mm	120 x 120 mm (t=300µm)		DTM-11-2
Crossed	25°	50 x 50mm	70 x 70 mm (t=300µm)		DTM-11-3
		100 x 100mm	120 x 120 mm (t=300µm)		DTM-11-4