Nanoimprint (NIL) Glossary

Si (silicone)

This is the best material, as it is easy to process and allows all kinds of measures. You can decide the width from mm.

Items	Master/Mold
Materials	Polymer
NIL	available

Glass

This is a material, suitable for UV imprinted mold.The width can be decided as freely as the Si one. About the depth, it is a little bit worse than Si, but its transparency can be used for making microfluidic chips.

Items	Mold/Imprinting
Materials	Polymer
NIL	available

Ni Electroforming Mold

Si and resist are developed from master. It's epistemic to hardness of Si and glass, as it's easy to recreate from original mold to copy mold.

Items	Mold/Imprinting
Materials	Polymer
NIL	available

Metal

Possible size of structure is the same as Si and glass, if Ti and W are used as the material. Its most specific feature is that it can be imprinted on glass. KII has developed its own mold

Items	Mold/Imprinting
Materials	Polymer/Glass
NIL	available

Diamond (under development)

Diamond is the best material for low-expansion, thermal resistance, thermal conductivity, hardness, tolerance to ablation, demolding, etc. Especially, it is suitable for nano-imprinting to glass.

Items	Mold/Imprinting
Materials	Glass

Resist

It has exceptional stability, when it comes to photolithography processing. Lens and other forms can be made 3D. The resist will be made a master and Ni electroforming will be brought, which will have NIL application possible.

Items	Master
Materials	Polymer

Materials

Polymer: For trial imprinting , most suitable is resist, PMMA, polyca, polyamide, polyester, COC, COP, etc. For other supplied resins, we can offer original imprinting.

Quartz: When we make this, we use interfered glass. For mold, the other often used material is quartz.

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製品分類1	Nanoimprinting
製品分類2
プロセス分類	Prptotyping, R&D\|Volume production\|Process & Equipment\|Others
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