Uniform coating technique for fine patterns
Fine MoZt™ is our original technology which realizes uniform coating on ultrafine pattern.
Applicable to various applications such as anti-sticking treatment for NIL(nanoimprint), hydrophobic coat etc.
Example Anti-sticking treatment for nanoimprint
Fine MoZt™ technology optimize "coatability : realization of uniform coat along the patterned structure" which is one of the most important element in anti-sticking treatment.
By conventional method, it is almost impossible to coat release agent in deep trench or groove especially when pattern size is sub-um level or aspect ratio is high.
realizes anti-sticking treatment on 10 aspect ratio pattern.
Nanoimprint series of services
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| 製品分類1 | Nanoimprinting |
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| 製品分類2 | Imprinting |
| プロセス分類 | Prptotyping, R&D|Volume production|Process & Equipment|Others |
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