Rotary Union repair
CMP Rotary Union repair / maintenance / overhaul
We offer economical refurbish service of “Rotary union”, which is a mechanism to supply air to polishing head.
Features
- Available for 200mm and 300mm CMP system.
- Available for both of 3 ports and 4 ports air supply system.
- Refurbishment of other maker's products is possible.
- Inspection for guarantee under the same condition as actual CMP process CMP.
- We prepare dedicated returnable container.
- Cost reduction up to 50% than brand-new one and more than 30% for repair.
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| 製品分類1 | onsumables parts for sale/repair/overhauls |
|---|---|
| 製品分類2 | CMP others |
| プロセス分類 | Volume production |
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