Self-Cleaning System (automatic cleaning)
This is a system to clean widely spluttered slurry in CMP equipment by splashing DI water automatically.
It dramatically reduce micro-scratch issue caused by congealed slurry.
Features
- We offer sale of spray unit set and/or installation services.
- Very effective system for user who are annoyed by micro-scratch issue.
- Possible to set-up sprays wherever users prefer to install.
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| 製品分類1 | Consumables parts for sale/repair/overhauls |
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| 製品分類2 | CMP others |
| プロセス分類 | Volume production |
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