Motor : Direct Drive (DD) repair
Ion Implanter Motor : Direct Drive (DD) repair
We offer repair service of costly Direct Drive motor and Belt Drive motor at reasonable price.
Feature
- Available for both of Direct Drive system and Belt Drive system.
- Available for both of 200mm and 300mm.
- Available for all "Motor type".
- Use OEM parts for exchange.
- Exchange of magnet seal is available.
- Operation test (Electric, Vacuum/water leakage) are done after overhaul.
- Realize 1/2 cost compare to OEM.
Flow chart
FAQ
- Is internal magnet seal for exchange an OEM parts? Or 2nd/3rd vendor parts?
- We use OEM parts.
- What is the criterion to exchange spindle motor?
- After disassemble, judgment is done by visual check of motor parts rust, broken condition etc.
- Is it possible to decide availability of operation based on result of judgment?
- Yes. But cost for assemble work and transportation may be chargeable.
- How long is warranty period?
- 6months after delivery. In case it requires long time to install the product after receipt, condition is to be discussed.
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| 製品分類1 | Consumables parts for sale/repair/overhauls |
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| 製品分類2 | Ion Implantation |
| プロセス分類 | Volume production |
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