Sputtering Target Stock List
| METALS | Unit #1 | Unit #2/3/6 | Unit #4 | Unit #5 | Unit #7 |
|---|---|---|---|---|---|
| Au | ◯ | ◯ | ◯ | ◯ | ◯ |
| Al | ◯ | ◯ | ◯ | ◯ | ◯ |
| Ag | ◯ | ◯ | ◯ | ◯ | ◯ |
| B | - | ◯ | - | - | - |
| Bi | ◯ | - | - | - | - |
| C | ◯ | ◯ | ◯ | - | - |
| Co | ◯ | ◯ | ◯ | ◯ | ◯ |
| Cr | ◯ | ◯ | ◯ | ◯ | ◯ |
| Cu | ◯ | ◯ | ◯ | ◯ | ◯ |
| Fe | ◯ | ◯ | ◯ | ◯ | ◯ |
| Ge | - | ◯ | - | - | - |
| Hf | ◯ | ◯ | - | - | - |
| In | - | ◯ | - | - | - |
| Ir | ◯ | ◯ | - | - | - |
| Mg | ◯ | ◯ | - | - | - |
| Mn | - | ◯ | - | - | - |
| Mo | ◯ | ◯ | ◯ | ◯ | ◯ |
| Nb | ◯ | ◯ | - | - | - |
| Ni | ◯ | ◯ | ◯ | ◯ | ◯ |
| Pd | - | ◯ | - | - | - |
| Pt | ◯ | ◯ | - | - | - |
| Rh | - | ◯ | - | - | - |
| Ru | - | ◯ | - | - | - |
| Si(N) | ◯ | ◯ | - | - | - |
| Si(P) | ◯ | ◯ | ◯ | - | - |
| Si (High resistivity) |
- | ◯ | - | - | - |
| Sn | - | ◯ | - | - | - |
| Ta | ◯ | ◯ | ◯ | - | - |
| Ti | ◯ | ◯ | ◯ | ◯ | ◯ |
| V | - | ◯ | - | - | - |
| W | ◯ | ◯ | ◯ | - | - |
| Y | - | ◯ | - | - | - |
| Zn | - | ◯ | - | - | - |
| Zr | ◯ | ◯ | - | - | - |
| SIRICIDES | Unit #1 | Unit #2/3/6 | Unit #4 | Unit #5 | Unit #7 |
|---|---|---|---|---|---|
| CoSi2 | - | ◯ | ◯ | - | - |
| CrSi2 | ◯ | - | - | - | - |
| MoSi2.5 | ◯ | ◯ | - | - | - |
| NiSi2 | - | ◯ | - | - | - |
| TaSi2 | - | ◯ | - | - | - |
| TiSi2 | - | ◯ | ◯ | - | - |
| WSi0.4 | ◯ | - | - | - | - |
| WSi2 | - | ◯ | ◯ | - | - |
| WSi2.5 | - | ◯ | - | - | - |
| ZrSi2 | - | ◯ | - | - | - |
| NITRIDES | Unit #1 | Unit #2/3/6 | Unit #4 | Unit #5 | Unit #7 |
|---|---|---|---|---|---|
| AIN | ◯ | ◯ | - | - | - |
| BN | - | ◯ | - | - | - |
| Cr2N | ◯ | - | - | - | - |
| Mo2N | - | ◯ | - | - | - |
| Si3N4 | ◯ | ◯ | ◯ | - | - |
| TiN | ◯ | ◯ | - | - | - |
| ZrN | ◯ | ◯ | - | - | - |
| CARBIDES | Unit #1 | Unit #2/3/6 | Unit #4 | Unit #5 | Unit #7 |
|---|---|---|---|---|---|
| SiC | ◯ | ◯ | ◯ | - | - |
| TiC | ◯ | - | ◯ | - | ◯ |
| WC | ◯ | - | - | - | - |
| SULFIDES | Unit #1 | Unit #2/3/6 | Unit #4 | Unit #5 | Unit #7 |
|---|---|---|---|---|---|
| ZnS | ◯ | - | - | - | - |
| ALLOYS | Unit #1 | Unit #2/3/6 | Unit #4 | Unit #5 | Unit #7 | |
|---|---|---|---|---|---|---|
| Al-Cu | - | ◯ | ◯ | ◯ | ◯ | 99.5:0.5wt% |
| Al-Nd | - | ◯ | - | ◯ | ◯ | 98:2at% |
| Al-Sc | - | ◯ | - | - | - | 99.9:0.1wt% |
| Al-Si | - | ◯ | ◯ | ◯ | ◯ | 99:1wt% |
| Al-Si-Cu | ◯ | ◯ | ◯ | - | - | 98.5:1:0.5wt% |
| Al-Ti | - | ◯ | - | - | - | 99.5:0.5wt% |
| Au-Sn | - | ◯ | - | - | - | 70:30wt% |
| Cu-Cr | ◯ | - | - | - | - | 92:8wt% |
| Cu-Cr | ◯ | - | - | - | - | 94:6wt% |
| Cu-Cr | ◯ | - | - | - | - | 96:4wt% |
| Cu-Ni | ◯ | - | - | - | - | 94:6wt% |
| Cu-Ni | ◯ | - | ◯ | - | - | 96:4wt% |
| Co-Cr | - | ◯ | - | - | - | 85:15wt% |
| Co-Ni | ◯ | - | - | - | - | 80:20wt% |
| Fe-Co | - | ◯ | - | - | - | 70:30at% |
| Ni-Cr | ◯ | ◯ | - | - | - | 80:20wt% |
| Ni-Cr-Si | ◯ | - | - | - | - | 40:40:20wt% |
| Ni-Cr-Si | ◯ | - | - | - | - | 45:45:10wt% |
| Ni-Fe | - | ◯ | - | - | - | 80:20wt% |
| TiW | - | ◯ | ◯ | - | - |
|
| OXIDES | Unit #1 | Unit #2/3/6 | Unit #4 | Unit #5 | Unit #7 | |
|---|---|---|---|---|---|---|
| Al2O3 | ◯ | ◯ | ◯ | - | - | - |
| AZO | - | ◯ | - | - | - | 3:97wt% |
| BaTiO3 | ◯ | ◯ | - | - | - | - |
| CaCO3 | ◯ | - | - | - | - | - |
| CeO2 | ◯ | ◯ | ◯ | - | - | - |
| CuO | ◯ | ◯ | ◯ | - | - | - |
| CrSiO | ◯ | - | - | - | - | 40:60at% |
| Fe2O3 | ◯ | - | - | - | - | - |
| Ga2O3 | - | ◯ | - | - | - | - |
| Gd2O3 | - | ◯ | - | - | - | - |
| HfO2 | ◯ | ◯ | ◯ | - | - | - |
| In2O3 | - | ◯ | - | - | - | - |
| ITO | ◯ | ◯ | ◯ | - | - | 90:10wt% |
| IZO | - | ◯ | ◯ | - | - | 90:10wt% |
| LiCoO2 | - | ◯ | - | - | - | - |
| LiMn2O4 | - | ◯ | - | - | - | - |
| Li3PO4 | - | ◯ | - | - | - | - |
| LiNbO3 | ◯ | - | - | - | - | - |
| MgO | ◯ | ◯ | - | - | - | - |
| Mn2O3 | - | ◯ | - | - | - | - |
| Nb2O5 | ◯ | ◯ | - | - | - | - |
| NiO | - | ◯ | - | - | - | - |
| PZT | - | ◯ | ◯ | - | - | Pb(Zr0.52Ti0.48)O3 |
| RuO2 | - | ◯ | - | - | - | - |
| SiO | ◯ | ◯ | - | - | - | - |
| SiO2 | ◯ | ◯ | ◯ | - | ◯ | - |
| SnO | - | ◯ | - | - | - | - |
| SnO2 | - | ◯ | - | - | - | - |
| SrRuO3 | - | ◯ | - | - | - | - |
| SrTiO3 | ◯ | ◯ | - | - | - | - |
| Ta2O5 | ◯ | ◯ | ◯ | - | - | - |
| TaSiO2 | ◯ | - | - | - | - | 20:80at% |
| TaSiO2 | ◯ | - | - | - | - | 30:70at% |
| TaSiO2 | ◯ | - | - | - | - | 40:60at% |
| TaSiO2 | ◯ | - | - | - | - | 45:55at% |
| Ta-SiO2-Ni | ◯ | - | - | - | - | 65.7:32.7:1.6at% |
| TiO | ◯ | - | - | - | - | - |
| TiO2 | ◯ | ◯ | ◯ | - | - | - |
| Y2O3 | - | ◯ | - | - | - | - |
| ZnO | - | ◯ | ◯ | - | - | - |
| ZrO2 | ◯ | - | - | - | - | - |
| ZrO2 : Y2O3 | - | ◯ | - | - | - | 97:3mol% Stabilized Zirconium |
| OTHERS | Unit #1 | Unit #2/3/6 | Unit #4 | Unit #5 | Unit #7 |
|---|---|---|---|---|---|
| Corning #1737 | - | ◯ | - | - | - |
| Sialon | ◯ | ◯ | - | - | - |
| Sendust | ◯ | - | - | - | - |
| Teflon | ◯ | - | - | - | - |
| Pyrex | ◯ | ◯ | - | - | - |
| BK7 | - | ◯ | - | - | - |
| CaF | ◯ | - | - | - | - |
| CaF2 | ◯ | - | - | - | - |
| MgF2 | ◯ | - | - | - | - |
- Unit #1 Φ3" target
- Unit #2/3/6 Φ4" target
- Unit #4/5/7 Φ8" target
- It is possible to make thin films with provided from customer targets.
- We sell targets as well.
検索用入力欄
記入時注意事項
- テーブルの行列は変更しないでください。
- 分類が複数ある場合は、| ←半角の縦棒で区切って連続で入力してください。
また、区切り文字の前後に空白は入れないでください。
| 製品分類1 | Deposition, Photolithography, Etching |
|---|---|
| 製品分類2 | Insulation layer|Backside electrode|Li secondary battery|ITO|PZT|Roll to Roll sputtering |
| プロセス分類 | Prptotyping, R&D |
| サムネイル画像 |
|
| 説明文 |
|
| リダイレクトURL |
|